![]() ![]() ![]() The Purion H offers exceptional versatility, throughput and uniformity, enabling chip manufacturers to achieve greater yield with the lowest cost of ownership."Īxcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 40 years. ![]() The Purion H has an innovative high current implanter architecture, featuring unique scanned spot beam technology, designed for advanced memory and logic applications. Axcelis announced completion of a Purion H™ high current tool eval at a leading advanced logic device manufacturer.Įxecutive Vice President, Product Development, Bill Bintz, commented, "We're very excited about the potential of this win, as we see significant opportunities for production buys in 20.
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